The formation of VO (A-center), VV and VO2 defects in irradiated Czochralski-grown silicon (Si) is of technological importance. Recent theoretical studies have examined the formation and charge states of the A-center in detail. Here we use density functional theory employing hybrid functionals to analyze the formation of VV and VO2 defects. The formation energy as a function of the Fermi energy is calculated for all possible charge states. For the VV and VO2 defects double negatively charged and neutral states dominate, respectively.
|Journal||Journal of Materials Science: Materials in Electronics|
|Publication status||Published - 2014|
Bibliographical noteThe full text of this item is not available from the repository. Article in press, full citation details will be updated once available.
The final publication is available at Springer via http://dx.doi.org/10.1007/s10854-014-2576-9.
- Charge state
- Formation energies
- Hybrid density functional theory
- Hybrid functionals
- Negatively charged
- Neutral state
- Theoretical study
- Density functional theory