Validation for Micro- and Nano-Sensors

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The rapid development of sensor and processing technologies is offering many opportunities for embedding new functionality within sensing devices. One important area is the development of diagnostics. While the generation of diagnostic error codes is becoming common, these can be difficult to integrate into a wider control system, and do not address the more fundamental issue of the quality of the underlying measurement. The SEVA (sensor validation) approach, which is now embedded in a Brtish Standard (BS-7986) proposes that each sensor assesses the quality of each measurement value is generates, including the influence of any diagnosed faults, in order to generate an on-line uncertainy value. This talk will give examples of sensors and techniques for validation, including its application to a micro-machined flow meter.
Original languageEnglish
Title of host publicationTechnical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show
Pages463 - 466
Number of pages4
ISBN (Electronic)0-9767985-8-1
Publication statusPublished - 7 May 2006
Externally publishedYes
Event2006 NSTI Nanotechnology Conference and Trade Show - Boston, United States
Duration: 7 May 200611 May 2006


Conference2006 NSTI Nanotechnology Conference and Trade Show
Country/TerritoryUnited States
Internet address

Bibliographical note

Open access publication


  • MEMS
  • sensors


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