Use of enclosed thin laminar liquid flows above ablation area for control of ejected material during excimer machining

Colin Dowding, Jonathan Lawrence

Research output: Chapter in Book/Report/Conference proceedingConference proceeding

1 Citation (Scopus)

Abstract

To observe excimer laser machining through enclosed thin liquid films and the effects thereof on debris control, new equipment was designed to contain a small control volume that can be supplied with an enclosed laminar 0.5 mm film of DI water to flow over the workpiece at a controlled flow rate. Using the same equipment, comparison with open laminar thin film DI water immersed ablation and non-liquid immersed ablation was possible. Reliable calculations of the debris size and density with respect to the distance from the centre of the shot, as well as the identification of modal trends in the dispersion of the debris were obtained from analysis of microscope images with graphical analysis software. The results suggest that debris ejection direction is dependent upon the beam incident angle with the workpiece and that dispersion distance is related to particle size, beam intensity and the material being machined. The results show enclosed, rapid flow liquid immersed ablation provides both better machined feature geometry and higher efficiency of debris removal than the other techniques investigated.
Original languageEnglish
Title of host publicationICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings
Pages893-902
Number of pages10
Publication statusPublished - 1 Dec 2009
Externally publishedYes
Event28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009 - Orlando, United States
Duration: 2 Nov 20095 Nov 2009

Publication series

NameICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings
Volume102

Conference

Conference28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009
CountryUnited States
CityOrlando
Period2/11/095/11/09

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Fingerprint Dive into the research topics of 'Use of enclosed thin laminar liquid flows above ablation area for control of ejected material during excimer machining'. Together they form a unique fingerprint.

  • Cite this

    Dowding, C., & Lawrence, J. (2009). Use of enclosed thin laminar liquid flows above ablation area for control of ejected material during excimer machining. In ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings (pp. 893-902). (ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings; Vol. 102).