Abstract
This paper presents the nano-characterization of thin films prepared from combined metal oxides for the optimal determination of trace hydrocarbon gases in geo-environmental fluids. Graduated percentage concentrations of tin dioxide (SnO2) and zinc oxide (ZnO) nanoparticles were combined, and deposited by RF magnetron sputtering under different conditions onto substrates to obtain thin films. Depending on the concentration of the combining metal oxides and the duration of plasma deposition, the as-grown layers of the thin films exhibited variable interesting surface morphology. The quantified surface roughness and particle nucleation of the films changed with variable concentrations. This study has provided valuable insight into the growth optimization of the thin film structure for optimal volatile gas sensing process.
Original language | English |
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Title of host publication | 8th Pacific Rim International Congress on Advanced Materials and Processing 2013, PRICM 8, Waikoloa, Hawaii, USA |
Editors | Fernand Marquis |
Publisher | Wiley |
Pages | 2157-2162 |
Number of pages | 6 |
Volume | 3 |
ISBN (Electronic) | 9781118792148 |
ISBN (Print) | 9780470943090 |
DOIs | |
Publication status | Published - 9 Aug 2013 |
Event | 8th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-8) - Waikoloa, Hawaii, United States Duration: 4 Aug 2013 → 9 Aug 2013 |
Conference
Conference | 8th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-8) |
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Country/Territory | United States |
City | Waikoloa, Hawaii |
Period | 4/08/13 → 9/08/13 |
Keywords
- Gas sensor
- Nanostructure
- Particle analysis
- ZnO
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials