Particle Sensor Using Solidly Mounted Resonators

Sanju Thomas, Farah H Villa-López, Jan Theunis, Jan Peters, Marina Cole, Julian W. Gardner

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    24 Citations (Scopus)
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    This paper describes the development of a novel particle sensing system employing zinc oxide based solidly mounted resonator (SMR) devices for the detection of airborne fine particles (i.e., PM2.5 and PM10). The system operates in a dual configuration in which two SMR devices are driven by Colpitts-type oscillators in a differential mode. Particles are detected by the frequency shift caused by the mass of particles present on one resonator with while the other acts as a reference channel. Experimental validation of the system was performed inside an environmental chamber using a dust generator with the particles of known size and concentration. A sensor sensitivity of 4.6 Hz per μg/m3 was demonstrated for the SMRs resonating at a frequency of 970 MHz. Our results demonstrate that the SMR-based system has the potential to be implemented in CMOS technology as a low-cost, miniature smart particle detector for the real-time monitoring of airborne particles.
    Original languageEnglish
    Pages (from-to)2282-2289
    Number of pages8
    JournalIEEE Sensors Journal
    Issue number8
    Publication statusPublished - 15 Apr 2016

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    • Acoustic wave sensor
    • air quality monitoring,
    • Colpitts oscillator,
    • particle sensor,
    • particulate matter,
    • solidly mounted resonator (SMR)


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