Micromachined silicon generator for harvesting power from vibrations

SP Beeby, MJ Tudor, E Koukharenko, NM White, T O'Donnell, C Saha, S Kulkarni, S Roy

    Research output: Contribution to conferencePaperpeer-review

    Abstract

    This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.
    Original languageEnglish
    Pages104-107
    Publication statusPublished - Nov 2004
    EventThe 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - Kyoto, Japan
    Duration: 28 Nov 200430 Nov 2004

    Conference

    ConferenceThe 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
    Abbreviated titlePowerMEMS 2004
    Country/TerritoryJapan
    CityKyoto
    Period28/11/0430/11/04

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