Micromachined silicon generator for harvesting power from vibrations

SP Beeby; MJ Tudor; E Koukharenko; NM White; T O'Donnell; C Saha; S Kulkarni; S Roy

Micromachined silicon generator for harvesting power from vibrations

SP Beeby, MJ Tudor, E Koukharenko, NM White, T O'Donnell, C Saha, S Kulkarni, S Roy

National Microelectronics Research Centre Ireland

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.

Original language	English
Pages	104-107
Publication status	Published - Nov 2004
Event	The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - Kyoto, Japan Duration: 28 Nov 2004 → 30 Nov 2004

Conference

Conference	The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
Abbreviated title	PowerMEMS 2004
Country/Territory	Japan
City	Kyoto
Period	28/11/04 → 30/11/04

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https://eprints.soton.ac.uk/260483/1/Micro_Generator_Power_from_Vibrations_-_4_page_abstract.pdf

Cite this

Beeby, SP., Tudor, MJ., Koukharenko, E., White, NM., O'Donnell, T., Saha, C., Kulkarni, S., & Roy, S. (2004). Micromachined silicon generator for harvesting power from vibrations. 104-107. Paper presented at The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Kyoto, Japan. https://eprints.soton.ac.uk/260483/1/Micro_Generator_Power_from_Vibrations_-_4_page_abstract.pdf

Beeby, SP, Tudor, MJ, Koukharenko, E, White, NM, O'Donnell, T, Saha, C, Kulkarni, S & Roy, S 2004, 'Micromachined silicon generator for harvesting power from vibrations', Paper presented at The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Kyoto, Japan, 28/11/04 - 30/11/04 pp. 104-107. <https://eprints.soton.ac.uk/260483/1/Micro_Generator_Power_from_Vibrations_-_4_page_abstract.pdf>

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title = "Micromachined silicon generator for harvesting power from vibrations",

abstract = "This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.",

author = "SP Beeby and MJ Tudor and E Koukharenko and NM White and T O'Donnell and C Saha and S Kulkarni and S Roy",

year = "2004",

month = nov,

language = "English",

pages = "104--107",

note = "The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2004 ; Conference date: 28-11-2004 Through 30-11-2004",

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TY - CONF

T1 - Micromachined silicon generator for harvesting power from vibrations

AU - Beeby, SP

AU - Tudor, MJ

AU - Koukharenko, E

AU - White, NM

AU - O'Donnell, T

AU - Saha, C

AU - Kulkarni, S

AU - Roy, S

PY - 2004/11

Y1 - 2004/11

N2 - This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.

AB - This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.

M3 - Paper

SP - 104

EP - 107

T2 - The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

Y2 - 28 November 2004 through 30 November 2004

ER -

Micromachined silicon generator for harvesting power from vibrations

Abstract

Conference

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