Micromachined silicon generator for harvesting power from vibrations

SP Beeby, MJ Tudor, E Koukharenko, NM White, T O'Donnell, C Saha, S Kulkarni, S Roy

Research output: Contribution to conferencePaper

Abstract

This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.
Original languageEnglish
Pages104-107
Publication statusPublished - Nov 2004
EventThe 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - Kyoto, Japan
Duration: 28 Nov 200430 Nov 2004

Conference

ConferenceThe 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
Abbreviated titlePowerMEMS 2004
CountryJapan
CityKyoto
Period28/11/0430/11/04

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Beeby, SP., Tudor, MJ., Koukharenko, E., White, NM., O'Donnell, T., Saha, C., ... Roy, S. (2004). Micromachined silicon generator for harvesting power from vibrations. 104-107. Paper presented at The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Kyoto, Japan.