MEMS enabled sensing microsystems: Bridging the gap from devices to systems

E. Gaura, R. Newman

Research output: Chapter in Book/Report/Conference proceedingConference proceeding

5 Citations (Scopus)

Abstract

The development of MEMS devices has generally followed a bottom up methodology, reaching now a stage where the capabilities of the devices could be used much more effectively in systems designed from the top down to include them. A holistic view of the requirements of MEMS based systems and the capabilities of the microdevices must be taken if such systems are to deliver the promise that was expected. This paper presents an overview of the integrative perspective required for workers in all areas of the field, to enable them to appreciate the system level design issues leading to breakthrough cogent sensing applications.
Original languageEnglish
Title of host publication2004 International Conference on Intelligent Mechatronics and Automation, 2004. Proceedings
PublisherIEEE
Pages933-938
Number of pages6
ISBN (Print)0-7803-8748-1
DOIs
Publication statusPublished - 7 Feb 2005
EventThe 2004 IEEE International Conference on Intelligent Mechatronics and Automation - Chengdu, China
Duration: 27 Aug 200431 Aug 2004

Conference

ConferenceThe 2004 IEEE International Conference on Intelligent Mechatronics and Automation
CountryChina
CityChengdu
Period27/08/0431/08/04

Keywords

  • Computer aided design
  • Constraint theory
  • Information analysis
  • Large scale systems
  • Micromachining
  • Network protocols
  • Sensors
  • Spectrum analysis, Cogent
  • Complex machines
  • Sensor intellignece
  • Sensor networks, Systems analysis

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  • Cite this

    Gaura, E., & Newman, R. (2005). MEMS enabled sensing microsystems: Bridging the gap from devices to systems. In 2004 International Conference on Intelligent Mechatronics and Automation, 2004. Proceedings (pp. 933-938). IEEE. https://doi.org/10.1109/ICIMA.2004.1384334