In-situ fibre-based surface profile measurement system using low coherence interferometer

Ranveer S. Matharu, Tom Hovell, Jon Petzing, Shreedhar Rangappa, Laura Justham, Peter Kinnell

Research output: Chapter in Book/Report/Conference proceedingConference proceeding

Abstract

For many high-value manufacturing applications, advanced control systems are required to ensure product quality is maintained; this requires accurate data to be collected from in-situ sensors. Making accurate in-situ measurements is challenging due to the aggressive environments found within manufacturing machines and processes. This paper investigates a method to obtain surface profile measurements in a spectral-domain, common-path, low-coherence system. A fibre based Low Coherence Interferometer was built and was used to experimentally measure surface profiles. The fringes obtained from interferograms were transformed into the Fourier domain to obtain a trackable peak relating to the surface depth. This has been illustrated with ideal step height measurements and referenced specimens as well as more challenging surface roughness measurements, which have produced complex signal processing issues. This work opens up avenues for a metrology based system where both machining and measurement system can coexist on the same plane, in aggressive environments.

Original languageEnglish
Title of host publicationOptical Sensing and Detection V
EditorsFrancis Berghmans, Anna G. Mignani
PublisherSPIE
ISBN (Electronic)9781510618862
DOIs
Publication statusPublished - 1 Jan 2018
Externally publishedYes
EventOptical Sensing and Detection V 2018 - Strasbourg, France
Duration: 23 Apr 201826 Apr 2018

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10680
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Sensing and Detection V 2018
CountryFrance
CityStrasbourg
Period23/04/1826/04/18

Keywords

  • In-situ
  • Low Coherence Interferometry
  • Metrology
  • Sensor
  • Water

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Matharu, R. S., Hovell, T., Petzing, J., Rangappa, S., Justham, L., & Kinnell, P. (2018). In-situ fibre-based surface profile measurement system using low coherence interferometer. In F. Berghmans, & A. G. Mignani (Eds.), Optical Sensing and Detection V [106801D] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10680). SPIE. https://doi.org/10.1117/12.2307248