Finite element modelling of particle sensors based on Solidly Mounted Resonators

Farah Helúe Villa-López, Sanju Thomas, Marina Cole, Julian W Gardner

Research output: Chapter in Book/Report/Conference proceedingConference proceedingpeer-review

2 Citations (Scopus)


A highly sensitive acoustic wave device based on Solidly Mounted Resonators (SMR) has been designed and modelled as part of the development of a smart monolithic sensor system for the detection of fine particles (PM2.5 and PM10). A 3D finite element model has been developed based on COMSOL software for the two-port resonators, operating at a frequency of 870 MHz. The model explores the frequency response of the SMRs to the deposition of different sizes particles. A comparative study between SMR devices using two different types of acoustic mirrors (W/SiO2 and Mo/SiO2) has been performed. From the Finite Element Analysis (FEA), it was demonstrated that the W/SiO2 based SMR is capable of detecting PM2.5 with a mass sensitivity of 4.8 kHz/pg with Mo/SiO2 exhibiting sensitivity of 5.3 kHz/pg. The study has demonstrated suitability of SMR devices for CMOS integration in a low-cost, miniature smart sensor system for the monitoring of airborne particulate matter.
Original languageEnglish
Title of host publication SENSORS, 2014 IEEE
Number of pages4
ISBN (Print) 978-1-4799-0162-3
Publication statusPublished - 12 Dec 2014
EventIEEE SENSORS 2014 - Valencia, Spain
Duration: 2 Nov 20145 Nov 2014

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395


ConferenceIEEE SENSORS 2014


  • Air quality monitoring
  • Finite element analysis
  • Particle sensing
  • Particulate matter
  • Solidly Mounted Resonator

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