@inproceedings{baecca63ad834c418d7150a559d2fd77,
title = "Finite element modelling of particle sensors based on Solidly Mounted Resonators",
abstract = "A highly sensitive acoustic wave device based on Solidly Mounted Resonators (SMR) has been designed and modelled as part of the development of a smart monolithic sensor system for the detection of fine particles (PM2.5 and PM10). A 3D finite element model has been developed based on COMSOL software for the two-port resonators, operating at a frequency of 870 MHz. The model explores the frequency response of the SMRs to the deposition of different sizes particles. A comparative study between SMR devices using two different types of acoustic mirrors (W/SiO2 and Mo/SiO2) has been performed. From the Finite Element Analysis (FEA), it was demonstrated that the W/SiO2 based SMR is capable of detecting PM2.5 with a mass sensitivity of 4.8 kHz/pg with Mo/SiO2 exhibiting sensitivity of 5.3 kHz/pg. The study has demonstrated suitability of SMR devices for CMOS integration in a low-cost, miniature smart sensor system for the monitoring of airborne particulate matter.",
keywords = "Air quality monitoring, Finite element analysis, Particle sensing, Particulate matter, Solidly Mounted Resonator",
author = "Villa-L{\'o}pez, {Farah Hel{\'u}e} and Sanju Thomas and Marina Cole and Gardner, {Julian W}",
year = "2014",
month = dec,
day = "12",
doi = "10.1109/ICSENS.2014.6985063",
language = "English",
isbn = " 978-1-4799-0162-3",
series = "Proceedings of IEEE Sensors ",
publisher = "IEEE",
pages = "574--577",
booktitle = "SENSORS, 2014 IEEE",
address = "United States",
note = "IEEE SENSORS 2014 ; Conference date: 02-11-2014 Through 05-11-2014",
}