Experimental and modeling study on the role of Ar addition to the working gas on the development of intrinsic stress in TiN coatings produced by filtered vacuum-arc plasma

V.V. Vasyliev, Alexander Kalinichenko, E.N. Reshetnyak, Golnaz Taghavi Pourian Azar, Mustafa Urgen, V.E. Strel'nitskij

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