POOLE, MARK, A. (Inventor),
COBLEY, ANDREW, J. (Inventor), SINGH,, A. (Inventor) & HIRST, DEBORAH, V. (Inventor),
16 Mar 2008, IPC No. C23C 18/38, C23C 18/40, Patent No. TW200813255A,
5 Jul 2007, Priority date
7 Jul 2006, Priority No. US20060819246P
Research output: Patent