Effect of substrate temperature on the characteristics of ZnO films produced by a combination of thermal vapor deposition and oxidation processes

C. Sneha, C. Prabukumar, M. Jayalakshmi, Suma Bhat, K. Udaya Bhat

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

In the present work, ZnO semiconductor films were prepared by following two step processes, namely, thermal vapor deposition of the zinc on the glass substrate followed by oxidative annealing. Substrate temperature during deposition of the zinc was varied. Structural properties and morphology of the ZnO films were investigated by using X-ray diffraction and scanning electron microscopy techniques. Hydrophobic nature of the film was confirmed by using contact angle analyser. Hall measurements facilitated the estimation of the carrier concentration, their mobility and their effect on the conductivity. Photoluminescence spectroscopy was used to analyse the lattice defect concentration in the film. Further, the sensor response of the ZnO film to CO gas was analysed. Sensor fabricated with ZnO films which were prepared by oxidizing Zn films deposited at higher substrate temperature were found to possess better response and faster response-recovery time than the film prepared using lower substrate temperature for zinc deposition.

Original languageEnglish
Pages (from-to)15959-15966
Number of pages8
JournalJournal of Materials Science: Materials in Electronics
Volume28
Issue number21
Early online date11 Jul 2017
DOIs
Publication statusPublished - 1 Nov 2017
Externally publishedYes

Bibliographical note

Publisher Copyright:
© 2017, Springer Science+Business Media, LLC.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Effect of substrate temperature on the characteristics of ZnO films produced by a combination of thermal vapor deposition and oxidation processes'. Together they form a unique fingerprint.

Cite this