Early electromigration effects and early resistance changes

A. Scorzoni, I. De Munari, M. Impronta, N. Kelaidis

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This paper reviews di€erent known physical phenomena acting during electromigration, such as changes in the mechanical stress of the metal line, void growth and precipitation/dissolution of alloy elements (Cu, Si) and their e€ects on early resistance changes. The superposition of all these phenomena is also discussed to describe the typical early resistance changes detected in Al±Cu lines of the present technology

Original languageEnglish
Pages (from-to)1647-1656
Number of pages10
JournalMicroelectronics Reliability
Volume39
Issue number11
DOIs
Publication statusPublished - Nov 1999
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Safety, Risk, Reliability and Quality
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Early electromigration effects and early resistance changes'. Together they form a unique fingerprint.

  • Cite this