This paper describes the development of a low-cost robust Surface Acoustic Wave Resonator (SAWR) microsensor capable of detecting sub-micron size particles with masses below 1 ng. The device here comprises two 262 MHz ST-cut quartz based Rayleigh wave SAW resonators where one is used for particle sensing and the other as a reference channel. Electro-acoustic detection of different particles (including carbon, gold, sucrose, silicon, and PTFE) with different particle diameters studied. The mass sensitivity Δf/Δm of the SAWR was found to be typically 275 Hz/ng or nearly 4 Hz/pg for the detection of 750 nm diameter gold particles. Consequently, our SAWR sensor is able to detect the typical levels of ultrafine particulate pollutants (PM2.5) found in city air today. We believe that the device could be used as a small, low-cost, and low power airborne particle sensor for the real-time and ubiquitous monitoring of airborne particulate matter.
|Title of host publication||Proceedings of IEEE Sensors|
|Publisher||IEEE Computer Society|
|Number of pages||4|
|Publication status||Published - 2013|
|Event||IEEE SENSORS 2013 - Baltimore, United States|
Duration: 3 Nov 2013 → 6 Nov 2013
|Name||Proceedings of IEEE Sensors|
|Conference||IEEE SENSORS 2013|
|Period||3/11/13 → 6/11/13|
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- Surface acoustic waves
- Surface acoustic wave devices
- Resonant frequency