Dual high-frequency Surface Acoustic Wave Resonator for ultrafine particle sensing

Sanju Thomas, Zoltan Racz, Marina Cole, Julian W Gardner

Research output: Chapter in Book/Report/Conference proceedingChapter

6 Citations (Scopus)
25 Downloads (Pure)

Abstract

This paper describes the development of a low-cost robust Surface Acoustic Wave Resonator (SAWR) microsensor capable of detecting sub-micron size particles with masses below 1 ng. The device here comprises two 262 MHz ST-cut quartz based Rayleigh wave SAW resonators where one is used for particle sensing and the other as a reference channel. Electro-acoustic detection of different particles (including carbon, gold, sucrose, silicon, and PTFE) with different particle diameters studied. The mass sensitivity Δf/Δm of the SAWR was found to be typically 275 Hz/ng or nearly 4 Hz/pg for the detection of 750 nm diameter gold particles. Consequently, our SAWR sensor is able to detect the typical levels of ultrafine particulate pollutants (PM2.5) found in city air today. We believe that the device could be used as a small, low-cost, and low power airborne particle sensor for the real-time and ubiquitous monitoring of airborne particulate matter.
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
PublisherIEEE Computer Society
Number of pages4
ISBN (Electronic)9781467346429
ISBN (Print)9781467346405
DOIs
Publication statusPublished - 2013
EventIEEE SENSORS 2013 - Baltimore, United States
Duration: 3 Nov 20136 Nov 2013

Publication series

NameProceedings of IEEE Sensors

Conference

ConferenceIEEE SENSORS 2013
CountryUnited States
CityBaltimore
Period3/11/136/11/13

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Keywords

  • Surface acoustic waves
  • Sensitivity
  • Surface acoustic wave devices
  • Sensors
  • Gold
  • Resonant frequency
  • Oscillators

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