Dual high-frequency Surface Acoustic Wave Resonator for ultrafine particle sensing

Sanju Thomas; Zoltan Racz; Marina Cole; Julian W Gardner

doi:10.1109/ICSENS.2013.6688319

Dual high-frequency Surface Acoustic Wave Resonator for ultrafine particle sensing

Sanju Thomas, Zoltan Racz, Marina Cole, Julian W Gardner

University of Warwick

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

8 Citations (Scopus)

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Abstract

This paper describes the development of a low-cost robust Surface Acoustic Wave Resonator (SAWR) microsensor capable of detecting sub-micron size particles with masses below 1 ng. The device here comprises two 262 MHz ST-cut quartz based Rayleigh wave SAW resonators where one is used for particle sensing and the other as a reference channel. Electro-acoustic detection of different particles (including carbon, gold, sucrose, silicon, and PTFE) with different particle diameters studied. The mass sensitivity Δf/Δm of the SAWR was found to be typically 275 Hz/ng or nearly 4 Hz/pg for the detection of 750 nm diameter gold particles. Consequently, our SAWR sensor is able to detect the typical levels of ultrafine particulate pollutants (PM2.5) found in city air today. We believe that the device could be used as a small, low-cost, and low power airborne particle sensor for the real-time and ubiquitous monitoring of airborne particulate matter.

Original language	English
Title of host publication	Proceedings of IEEE Sensors
Publisher	IEEE Computer Society
Number of pages	4
ISBN (Electronic)	9781467346429
ISBN (Print)	9781467346405
DOIs	https://doi.org/10.1109/ICSENS.2013.6688319
Publication status	Published - 2013
Event	IEEE SENSORS 2013 - Baltimore, United States Duration: 3 Nov 2013 → 6 Nov 2013

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	IEEE SENSORS 2013
Country/Territory	United States
City	Baltimore
Period	3/11/13 → 6/11/13

Bibliographical note

© 2013 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including
reprinting/republishing this material for advertising or promotional purposes,
creating new collective works, for resale or redistribution to servers or lists, or
reuse of any copyrighted component of this work in other works.
Copyright © and Moral Rights are retained by the author(s) and/ or other copyright owners. A copy can be downloaded for personal non-commercial research or study, without prior permission or charge. This item cannot be reproduced or quoted extensively from without first obtaining permission in writing from the copyright holder(s). The content must not be changed in any way or sold commercially in any format or medium without the formal permission of the copyright holders.

Keywords

Surface acoustic waves
Sensitivity
Surface acoustic wave devices
Sensors
Gold
Resonant frequency
Oscillators

Access to Document

10.1109/ICSENS.2013.6688319

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http://www.mendeley.com/research/dual-highfrequency-surface-acoustic-wave-resonator-ultrafine-particle-sensing

Cite this

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title = "Dual high-frequency Surface Acoustic Wave Resonator for ultrafine particle sensing",

abstract = "This paper describes the development of a low-cost robust Surface Acoustic Wave Resonator (SAWR) microsensor capable of detecting sub-micron size particles with masses below 1 ng. The device here comprises two 262 MHz ST-cut quartz based Rayleigh wave SAW resonators where one is used for particle sensing and the other as a reference channel. Electro-acoustic detection of different particles (including carbon, gold, sucrose, silicon, and PTFE) with different particle diameters studied. The mass sensitivity Δf/Δm of the SAWR was found to be typically 275 Hz/ng or nearly 4 Hz/pg for the detection of 750 nm diameter gold particles. Consequently, our SAWR sensor is able to detect the typical levels of ultrafine particulate pollutants (PM2.5) found in city air today. We believe that the device could be used as a small, low-cost, and low power airborne particle sensor for the real-time and ubiquitous monitoring of airborne particulate matter.",

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author = "Sanju Thomas and Zoltan Racz and Marina Cole and Gardner, {Julian W}",

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AU - Thomas, Sanju

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N2 - This paper describes the development of a low-cost robust Surface Acoustic Wave Resonator (SAWR) microsensor capable of detecting sub-micron size particles with masses below 1 ng. The device here comprises two 262 MHz ST-cut quartz based Rayleigh wave SAW resonators where one is used for particle sensing and the other as a reference channel. Electro-acoustic detection of different particles (including carbon, gold, sucrose, silicon, and PTFE) with different particle diameters studied. The mass sensitivity Δf/Δm of the SAWR was found to be typically 275 Hz/ng or nearly 4 Hz/pg for the detection of 750 nm diameter gold particles. Consequently, our SAWR sensor is able to detect the typical levels of ultrafine particulate pollutants (PM2.5) found in city air today. We believe that the device could be used as a small, low-cost, and low power airborne particle sensor for the real-time and ubiquitous monitoring of airborne particulate matter.

AB - This paper describes the development of a low-cost robust Surface Acoustic Wave Resonator (SAWR) microsensor capable of detecting sub-micron size particles with masses below 1 ng. The device here comprises two 262 MHz ST-cut quartz based Rayleigh wave SAW resonators where one is used for particle sensing and the other as a reference channel. Electro-acoustic detection of different particles (including carbon, gold, sucrose, silicon, and PTFE) with different particle diameters studied. The mass sensitivity Δf/Δm of the SAWR was found to be typically 275 Hz/ng or nearly 4 Hz/pg for the detection of 750 nm diameter gold particles. Consequently, our SAWR sensor is able to detect the typical levels of ultrafine particulate pollutants (PM2.5) found in city air today. We believe that the device could be used as a small, low-cost, and low power airborne particle sensor for the real-time and ubiquitous monitoring of airborne particulate matter.

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KW - Sensitivity

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KW - Gold

KW - Resonant frequency

KW - Oscillators

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M3 - Chapter

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PB - IEEE Computer Society

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Y2 - 3 November 2013 through 6 November 2013

ER -

Dual high-frequency Surface Acoustic Wave Resonator for ultrafine particle sensing

Abstract

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Keywords

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