Abstract
This letter presents first-ever fabricated GaN split-current magnetic sensor device. Device operation and key manufacturing steps are also presented. The measured relative current sensitivity is constant at 14 % T -1 for wide mT range of the magnetic field. Constant sensitivity of a fabricated sensor can be attributed to device's 2DEG nature, i.e., its high electron concentration and mobility, and very small layer thickness.
Original language | English |
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Article number | 5 |
Pages (from-to) | 746 - 748 |
Number of pages | 3 |
Journal | IEEE Electron Device Letters |
Volume | 39 |
Issue number | 5 |
Early online date | 15 Mar 2018 |
DOIs | |
Publication status | Published - May 2018 |
Externally published | Yes |
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Keywords
- Sensor
- power electronics
- GaN
- magnetic field
ASJC Scopus subject areas
- Engineering(all)
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Petar Igic
- Centre for E-Mobility and Clean Growth - Professor in Power Semiconductor Applications
Person: Teaching and Research