Design and performance of a microelectromagnetic vibration powered generator

S.P. Beeby; M.J. Tudor; E. Koukharenko; N.M. White; T. O'Donnell; C. Saha; S. Kulkarni; S. Roy

doi:10.1109/SENSOR.2005.1496533

Design and performance of a microelectromagnetic vibration powered generator

S.P. Beeby, M.J. Tudor, E. Koukharenko, N.M. White, T. O'Donnell, C. Saha, S. Kulkarni, S. Roy

University of Southampton

Research output: Chapter in Book/Report/Conference proceeding › Foreword/postscript › peer-review

35 Citations (Scopus)

Abstract

In this paper we, report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. The development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and a low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft's Maxwell 2D software have shown voltage levels of 4 to 9 V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 /spl mu/W at 9.81 ms/sup -2/ and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.

Original language	English
Title of host publication	The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05
Publisher	IEEE
Pages	780-783
Number of pages	4
Volume	1
ISBN (Print)	0-7803-8994-8
DOIs	https://doi.org/10.1109/SENSOR.2005.1496533
Publication status	Published - 22 Aug 2005
Event	The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 - Seoul, Korea Duration: 5 Jun 2005 → 9 Jun 2005

Conference

Conference	The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05
Period	5/06/05 → 9/06/05

Keywords

Power generation
Silicon
Fabrication
Atmospheric modelling
Magnets
Coils
Standards development
Costs
Finite element methods
Solid modeling
vibrations
permanent magnet generators
micromechanical resonators
finite element analysis
9.5 kHz
electromagnetic resonant generator
microelectromagnetic vibration powered generator
micromachined microgenerator
finite element simulation
electromagnetic transduction
moving coil
static magnets
single beam generator
air damping induced losses
4 to 9 V
0.5 muW

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10.1109/SENSOR.2005.1496533

Cite this

Beeby, S. P., Tudor, M. J., Koukharenko, E., White, N. M., O'Donnell, T., Saha, C., Kulkarni, S., & Roy, S. (2005). Design and performance of a microelectromagnetic vibration powered generator. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05 (Vol. 1, pp. 780-783). IEEE. https://doi.org/10.1109/SENSOR.2005.1496533

Design and performance of a microelectromagnetic vibration powered generator. / Beeby, S.P.; Tudor, M.J.; Koukharenko, E. et al.
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05. Vol. 1 IEEE, 2005. p. 780-783.

Research output: Chapter in Book/Report/Conference proceeding › Foreword/postscript › peer-review

Beeby, SP, Tudor, MJ, Koukharenko, E, White, NM, O'Donnell, T, Saha, C, Kulkarni, S & Roy, S 2005, Design and performance of a microelectromagnetic vibration powered generator. in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05. vol. 1, IEEE, pp. 780-783, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1496533

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abstract = "In this paper we, report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. The development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and a low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft's Maxwell 2D software have shown voltage levels of 4 to 9 V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 /spl mu/W at 9.81 ms/sup -2/ and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.",

keywords = "Power generation, Silicon, Fabrication, Atmospheric modelling, Magnets, Coils, Standards development, Costs, Finite element methods, Solid modeling, vibrations, permanent magnet generators, micromechanical resonators, finite element analysis, 9.5 kHz, electromagnetic resonant generator, microelectromagnetic vibration powered generator, micromachined microgenerator, finite element simulation, electromagnetic transduction, moving coil, static magnets, single beam generator, air damping induced losses, 4 to 9 V, 0.5 muW",

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T1 - Design and performance of a microelectromagnetic vibration powered generator

AU - Beeby, S.P.

AU - Tudor, M.J.

AU - Koukharenko, E.

AU - White, N.M.

AU - O'Donnell, T.

AU - Saha, C.

AU - Kulkarni, S.

AU - Roy, S.

PY - 2005/8/22

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N2 - In this paper we, report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. The development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and a low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft's Maxwell 2D software have shown voltage levels of 4 to 9 V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 /spl mu/W at 9.81 ms/sup -2/ and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.

AB - In this paper we, report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. The development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and a low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft's Maxwell 2D software have shown voltage levels of 4 to 9 V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 /spl mu/W at 9.81 ms/sup -2/ and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.

KW - Power generation

KW - Silicon

KW - Fabrication

KW - Atmospheric modelling

KW - Magnets

KW - Coils

KW - Standards development

KW - Costs

KW - Finite element methods

KW - Solid modeling

KW - vibrations

KW - permanent magnet generators

KW - micromechanical resonators

KW - finite element analysis

KW - 9.5 kHz

KW - electromagnetic resonant generator

KW - microelectromagnetic vibration powered generator

KW - micromachined microgenerator

KW - finite element simulation

KW - electromagnetic transduction

KW - moving coil

KW - static magnets

KW - single beam generator

KW - air damping induced losses

KW - 4 to 9 V

KW - 0.5 muW

U2 - 10.1109/SENSOR.2005.1496533

DO - 10.1109/SENSOR.2005.1496533

M3 - Foreword/postscript

SN - 0-7803-8994-8

VL - 1

SP - 780

EP - 783

BT - The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05

PB - IEEE

T2 - The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

Design and performance of a microelectromagnetic vibration powered generator

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