Design and performance of a microelectromagnetic vibration powered generator

S.P. Beeby, M.J. Tudor, E. Koukharenko, N.M. White, T. O'Donnell, C. Saha, S. Kulkarni, S. Roy

Research output: Chapter in Book/Report/Conference proceedingForeword/postscript

32 Citations (Scopus)

Abstract

In this paper we, report on the design, simulation and initial results of a microgenerator, which converts external vibrations into electrical energy. Power is generated by means of electromagnetic transduction with static magnets positioned either side of a moving coil located on a silicon structure designed to resonate laterally in the plane of the chip. The development and fabrication of a micromachined microgenerator that uses standard silicon based fabrication techniques and a low cost, batch process is presented. Finite element simulations have been carried out using ANSYS to determine an optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft's Maxwell 2D software have shown voltage levels of 4 to 9 V can be generated from the single beam generator designs. Initial results at atmospheric pressure yield 0.5 /spl mu/W at 9.81 ms/sup -2/ and 9.5 kHz and emphasise the importance of reducing unwanted loss mechanisms such as air damping.
Original languageEnglish
Title of host publicationThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05
PublisherIEEE
Pages780-783
Number of pages4
Volume1
ISBN (Print)0-7803-8994-8
DOIs
Publication statusPublished - 22 Aug 2005
EventThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 - Seoul, Korea
Duration: 5 Jun 20059 Jun 2005

Conference

ConferenceThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05
Period5/06/059/06/05

Keywords

  • Power generation
  • Silicon
  • Fabrication
  • Atmospheric modelling
  • Magnets
  • Coils
  • Standards development
  • Costs
  • Finite element methods
  • Solid modeling
  • vibrations
  • permanent magnet generators
  • micromechanical resonators
  • finite element analysis
  • 9.5 kHz
  • electromagnetic resonant generator
  • microelectromagnetic vibration powered generator
  • micromachined microgenerator
  • finite element simulation
  • electromagnetic transduction
  • moving coil
  • static magnets
  • single beam generator
  • air damping induced losses
  • 4 to 9 V
  • 0.5 muW

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  • Cite this

    Beeby, S. P., Tudor, M. J., Koukharenko, E., White, N. M., O'Donnell, T., Saha, C., ... Roy, S. (2005). Design and performance of a microelectromagnetic vibration powered generator. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05 (Vol. 1, pp. 780-783). IEEE. https://doi.org/10.1109/SENSOR.2005.1496533