Abstract
This paper presents system level modelling and simulations results of two closed loop, force-feedback control strategies for micromachined tunnelling accelerometers. The first approach is based on the incorporation of the sensing element in a sigma-delta modulator loop. The second strategy relies on two artificial neural networks (ANN) for both controlling the sensor and linearising the feedback loop. Both approaches have their merits and disadvantages. The former results in a direct digital sensor but it may prove problematic to achieve sufficiently high signal to quantisation noise ratios. The latter requires the use of an analogue to digital converter (at the output of the pick-off circuit) but has the advantage of achieving better measurement linearity.
| Original language | English |
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| Title of host publication | 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 |
| Editors | M. Laudon, B. Romanowicz |
| Place of Publication | Texas, US |
| Publisher | NSTI |
| Pages | 100-103 |
| Number of pages | 4 |
| ISBN (Print) | 0970827504 |
| Publication status | Published - 2001 |
| Event | 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 - Hilton Head Island, United States Duration: 19 Mar 2001 → 21 Mar 2001 |
Conference
| Conference | 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 |
|---|---|
| Country/Territory | United States |
| City | Hilton Head Island |
| Period | 19/03/01 → 21/03/01 |
Keywords
- Accelerometers
- Closed loop control systems
- Computational complexity
- Delta sigma modulation
- Mathematical models
- Modulators
- Neural networks
- Signal to noise ratio
- Transducers, Closed-loop tunneling accelerometers
- Digital control
- Mechanical sensing element
- Micromachined sensing element, Micromachining