### Abstract

Original language | English |
---|---|

Pages (from-to) | 47-62 |

Number of pages | 16 |

Journal | Systems Science |

Volume | 25 |

Issue number | 4 |

Publication status | Published - 1999 |

### Fingerprint

### Keywords

- Closed loop control systems
- Computer simulation
- Digital control systems
- Electrostatics
- Linear control systems
- Neural networks
- Three term control systems
- Two term control systems, Closed loop actuation
- Closed loop micromachined accelerometers, Accelerometers

### Cite this

*Systems Science*,

*25*(4), 47-62.

**Comparison of approaches for the design of closed-loop micromachined accelerometers.** / Gaura, E.I.; Kraft, M.; Steele, N.; Rider, R.J.

Research output: Contribution to journal › Article

*Systems Science*, vol. 25, no. 4, pp. 47-62.

}

TY - JOUR

T1 - Comparison of approaches for the design of closed-loop micromachined accelerometers

AU - Gaura, E.I.

AU - Kraft, M.

AU - Steele, N.

AU - Rider, R.J.

PY - 1999

Y1 - 1999

N2 - Traditionally, closed-loop actuation has been used for many sensors to increase the bandwidth, dynamic range and to linearise the response of the transducer. In this paper, three control approaches are described with application to a bulk-micromachined accelerometer with capacitive signal pick-off. This device has inherent nonlinear properties in open-loop operation. All three approaches rely on balancing the inertial force acting on the proof mass by electrostatic actuation, the magnitude of which provides a measure of the acceleration signal. The first approach is a simple, analogue, linear control strategy based on proportional, integral and derivative control action. The second approach uses a digital control strategy, based on proportional, integral control action. The third approach employs a novel strategy based upon an artificial neural network. Simulation results suggest that a closed-loop accelerometer with neural network control will have a more stable behaviour and a wider dynamic range than its analogue or digital counterparts.

AB - Traditionally, closed-loop actuation has been used for many sensors to increase the bandwidth, dynamic range and to linearise the response of the transducer. In this paper, three control approaches are described with application to a bulk-micromachined accelerometer with capacitive signal pick-off. This device has inherent nonlinear properties in open-loop operation. All three approaches rely on balancing the inertial force acting on the proof mass by electrostatic actuation, the magnitude of which provides a measure of the acceleration signal. The first approach is a simple, analogue, linear control strategy based on proportional, integral and derivative control action. The second approach uses a digital control strategy, based on proportional, integral control action. The third approach employs a novel strategy based upon an artificial neural network. Simulation results suggest that a closed-loop accelerometer with neural network control will have a more stable behaviour and a wider dynamic range than its analogue or digital counterparts.

KW - Closed loop control systems

KW - Computer simulation

KW - Digital control systems

KW - Electrostatics

KW - Linear control systems

KW - Neural networks

KW - Three term control systems

KW - Two term control systems, Closed loop actuation

KW - Closed loop micromachined accelerometers, Accelerometers

M3 - Article

VL - 25

SP - 47

EP - 62

JO - Systems Science

JF - Systems Science

SN - 0137-1223

IS - 4

ER -