A system for the removal of debris produced during laser micromachining

C. F. Dowding; J. Lawrence

A system for the removal of debris produced during laser micromachining

C. F. Dowding, J. Lawrence

Loughborough University

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper describes an attempt to solve the issue of debris produced in large area laser micromachining for the rapid, accurate production of micron scale arrayed geometric features. Mechanical removal means are shown to be unsuitable, while gas jetting and vacuum extraction seem to be ineffective when compared to the large adhesion forces at work. Instead, vibration based methods are touted alongside the use of immersion. This system will be developed using an analytical method: Computational Fluid Dynamics (CFD), to clarify ideas and refine the design though an iterative process. The final design appears to be capable of producing a flow sufficient to provide a clean "water window" of 25 mm x 2 mm in size at a rate of 200 Hz.

Original language	English
Publication status	Published - 1 Dec 2006
Externally published	Yes
Event	25th International Congress on Applications of Laser and Electro-Optics - Scottsdale, United States Duration: 30 Oct 2006 → 2 Nov 2006

Conference

Conference	25th International Congress on Applications of Laser and Electro-Optics
Abbreviated title	ICALEO 2006
Country/Territory	United States
City	Scottsdale
Period	30/10/06 → 2/11/06

ASJC Scopus subject areas

Geochemistry and Petrology
Electrical and Electronic Engineering

Cite this

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abstract = "This paper describes an attempt to solve the issue of debris produced in large area laser micromachining for the rapid, accurate production of micron scale arrayed geometric features. Mechanical removal means are shown to be unsuitable, while gas jetting and vacuum extraction seem to be ineffective when compared to the large adhesion forces at work. Instead, vibration based methods are touted alongside the use of immersion. This system will be developed using an analytical method: Computational Fluid Dynamics (CFD), to clarify ideas and refine the design though an iterative process. The final design appears to be capable of producing a flow sufficient to provide a clean {"}water window{"} of 25 mm x 2 mm in size at a rate of 200 Hz.",

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AU - Lawrence, J.

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N2 - This paper describes an attempt to solve the issue of debris produced in large area laser micromachining for the rapid, accurate production of micron scale arrayed geometric features. Mechanical removal means are shown to be unsuitable, while gas jetting and vacuum extraction seem to be ineffective when compared to the large adhesion forces at work. Instead, vibration based methods are touted alongside the use of immersion. This system will be developed using an analytical method: Computational Fluid Dynamics (CFD), to clarify ideas and refine the design though an iterative process. The final design appears to be capable of producing a flow sufficient to provide a clean "water window" of 25 mm x 2 mm in size at a rate of 200 Hz.

AB - This paper describes an attempt to solve the issue of debris produced in large area laser micromachining for the rapid, accurate production of micron scale arrayed geometric features. Mechanical removal means are shown to be unsuitable, while gas jetting and vacuum extraction seem to be ineffective when compared to the large adhesion forces at work. Instead, vibration based methods are touted alongside the use of immersion. This system will be developed using an analytical method: Computational Fluid Dynamics (CFD), to clarify ideas and refine the design though an iterative process. The final design appears to be capable of producing a flow sufficient to provide a clean "water window" of 25 mm x 2 mm in size at a rate of 200 Hz.

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M3 - Paper

T2 - 25th International Congress on Applications of Laser and Electro-Optics

Y2 - 30 October 2006 through 2 November 2006

ER -

A system for the removal of debris produced during laser micromachining

Abstract

Conference

ASJC Scopus subject areas

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