A system for the removal of debris produced during laser micromachining

C. F. Dowding, J. Lawrence

Research output: Contribution to conferencePaper

Abstract

This paper describes an attempt to solve the issue of debris produced in large area laser micromachining for the rapid, accurate production of micron scale arrayed geometric features. Mechanical removal means are shown to be unsuitable, while gas jetting and vacuum extraction seem to be ineffective when compared to the large adhesion forces at work. Instead, vibration based methods are touted alongside the use of immersion. This system will be developed using an analytical method: Computational Fluid Dynamics (CFD), to clarify ideas and refine the design though an iterative process. The final design appears to be capable of producing a flow sufficient to provide a clean "water window" of 25 mm x 2 mm in size at a rate of 200 Hz.

Original languageEnglish
Publication statusPublished - 1 Dec 2006
Externally publishedYes
Event25th International Congress on Applications of Laser and Electro-Optics - Scottsdale, United States
Duration: 30 Oct 20062 Nov 2006

Conference

Conference25th International Congress on Applications of Laser and Electro-Optics
Abbreviated titleICALEO 2006
CountryUnited States
CityScottsdale
Period30/10/062/11/06

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

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  • Cite this

    Dowding, C. F., & Lawrence, J. (2006). A system for the removal of debris produced during laser micromachining. Paper presented at 25th International Congress on Applications of Laser and Electro-Optics, Scottsdale, United States.