A low-cost acoustic microsensor based system in package for air quality monitoring

Sanju Thomas, Marina Cole, Farah H Villa-López, Julian W Gardner, Jan Peters, Jan Theunis

Research output: Chapter in Book/Report/Conference proceedingConference proceeding

1 Citation (Scopus)
15 Downloads (Pure)

Abstract

In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates. The hybrid particle sensing system consists of a zinc oxide (ZnO) based solidly mounted resonator (SMR) device interfaced to a CMOS application-specific integrated circuit (ASIC) chip. Air is drawn into a virtual impactor where PM2.5 particles are separated and then deposited onto the SMR surface. The mass loading due to the fine particles is measured as a shift in the resonant frequency of the SMR working at 894 MHz. Experimental results performed in both laboratory conditions and real outdoor environment showed that the hybrid system is capable of detecting fine particles with a sensitivity of 7.5 kHz per μg/m3. This system is used as a basis towards a fully integrated portable smart particle sensor based on CMOS-SMR devices for the continuous, real-time and low- cost monitoring of airborne particulate matter. Keywords—
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages3
ISBN (Electronic)9781479982875
DOIs
Publication statusPublished - 5 Jan 2017
Event2016 IEEE SENSORS - Orlando, United States
Duration: 30 Oct 20163 Nov 2016

Publication series

NameProceedings of IEEE Sensors

Conference

Conference2016 IEEE SENSORS
CountryUnited States
CityOrlando
Period30/10/163/11/16

Bibliographical note

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Keywords

  • CMOS sensor
  • air quality monitoring
  • particle sensing
  • particulate matter
  • solidly mounted resonator

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  • Cite this

    Thomas, S., Cole, M., Villa-López, F. H., Gardner, J. W., Peters, J., & Theunis, J. (2017). A low-cost acoustic microsensor based system in package for air quality monitoring. In Proceedings of IEEE Sensors (Proceedings of IEEE Sensors). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2016.7808872