A low-cost acoustic microsensor based system in package for air quality monitoring

Sanju Thomas, Marina Cole, Farah H Villa-López, Julian W Gardner, Jan Peters, Jan Theunis

    Research output: Chapter in Book/Report/Conference proceedingConference proceedingpeer-review

    6 Citations (Scopus)
    147 Downloads (Pure)


    In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates. The hybrid particle sensing system consists of a zinc oxide (ZnO) based solidly mounted resonator (SMR) device interfaced to a CMOS application-specific integrated circuit (ASIC) chip. Air is drawn into a virtual impactor where PM2.5 particles are separated and then deposited onto the SMR surface. The mass loading due to the fine particles is measured as a shift in the resonant frequency of the SMR working at 894 MHz. Experimental results performed in both laboratory conditions and real outdoor environment showed that the hybrid system is capable of detecting fine particles with a sensitivity of 7.5 kHz per μg/m3. This system is used as a basis towards a fully integrated portable smart particle sensor based on CMOS-SMR devices for the continuous, real-time and low- cost monitoring of airborne particulate matter. Keywords—
    Original languageEnglish
    Title of host publicationProceedings of IEEE Sensors
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Number of pages3
    ISBN (Electronic)9781479982875
    Publication statusPublished - 5 Jan 2017
    Event2016 IEEE SENSORS - Orlando, United States
    Duration: 30 Oct 20163 Nov 2016

    Publication series

    NameProceedings of IEEE Sensors


    Conference2016 IEEE SENSORS
    Country/TerritoryUnited States

    Bibliographical note

    © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

    Copyright © and Moral Rights are retained by the author(s) and/ or other copyright owners. A copy can be downloaded for personal non-commercial research or study, without prior permission or charge. This item cannot be reproduced or quoted extensively from without first obtaining permission in writing from the copyright holder(s). The content must not be changed in any way or sold commercially in any format or medium without the formal permission of the copyright holders.


    • CMOS sensor
    • air quality monitoring
    • particle sensing
    • particulate matter
    • solidly mounted resonator


    Dive into the research topics of 'A low-cost acoustic microsensor based system in package for air quality monitoring'. Together they form a unique fingerprint.

    Cite this