A low-cost acoustic microsensor based system in package for air quality monitoring

Sanju Thomas; Marina Cole; Farah H  Villa-López; Julian W Gardner; Jan Peters; Jan Theunis

doi:10.1109/ICSENS.2016.7808872

A low-cost acoustic microsensor based system in package for air quality monitoring

Sanju Thomas, Marina Cole, Farah H Villa-López, Julian W Gardner, Jan Peters, Jan Theunis

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding › peer-review

7 Citations (Scopus)

183 Downloads (Pure)

Abstract

In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates. The hybrid particle sensing system consists of a zinc oxide (ZnO) based solidly mounted resonator (SMR) device interfaced to a CMOS application-specific integrated circuit (ASIC) chip. Air is drawn into a virtual impactor where PM2.5 particles are separated and then deposited onto the SMR surface. The mass loading due to the fine particles is measured as a shift in the resonant frequency of the SMR working at 894 MHz. Experimental results performed in both laboratory conditions and real outdoor environment showed that the hybrid system is capable of detecting fine particles with a sensitivity of 7.5 kHz per μg/m3. This system is used as a basis towards a fully integrated portable smart particle sensor based on CMOS-SMR devices for the continuous, real-time and low- cost monitoring of airborne particulate matter. Keywords—

Original language	English
Title of host publication	Proceedings of IEEE Sensors
Publisher	Institute of Electrical and Electronics Engineers Inc.
Number of pages	3
ISBN (Electronic)	9781479982875
DOIs	https://doi.org/10.1109/ICSENS.2016.7808872
Publication status	Published - 5 Jan 2017
Event	2016 IEEE SENSORS - Orlando, United States Duration: 30 Oct 2016 → 3 Nov 2016

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	2016 IEEE SENSORS
Country/Territory	United States
City	Orlando
Period	30/10/16 → 3/11/16

Bibliographical note

© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

Copyright © and Moral Rights are retained by the author(s) and/ or other copyright owners. A copy can be downloaded for personal non-commercial research or study, without prior permission or charge. This item cannot be reproduced or quoted extensively from without first obtaining permission in writing from the copyright holder(s). The content must not be changed in any way or sold commercially in any format or medium without the formal permission of the copyright holders.

Keywords

CMOS sensor
air quality monitoring
particle sensing
particulate matter
solidly mounted resonator

Access to Document

10.1109/ICSENS.2016.7808872

Post-PrintAccepted author manuscript, 1.66 MB

http://www.mendeley.com/research/lowcost-acoustic-microsensor-based-system-package-air-quality-monitoring

Cite this

Thomas, S, Cole, M, Villa-López, FH, Gardner, JW, Peters, J & Theunis, J 2017, A low-cost acoustic microsensor based system in package for air quality monitoring. in Proceedings of IEEE Sensors. Proceedings of IEEE Sensors, Institute of Electrical and Electronics Engineers Inc., 2016 IEEE SENSORS, Orlando, United States, 30/10/16. https://doi.org/10.1109/ICSENS.2016.7808872

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abstract = "In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates. The hybrid particle sensing system consists of a zinc oxide (ZnO) based solidly mounted resonator (SMR) device interfaced to a CMOS application-specific integrated circuit (ASIC) chip. Air is drawn into a virtual impactor where PM2.5 particles are separated and then deposited onto the SMR surface. The mass loading due to the fine particles is measured as a shift in the resonant frequency of the SMR working at 894 MHz. Experimental results performed in both laboratory conditions and real outdoor environment showed that the hybrid system is capable of detecting fine particles with a sensitivity of 7.5 kHz per μg/m3. This system is used as a basis towards a fully integrated portable smart particle sensor based on CMOS-SMR devices for the continuous, real-time and low- cost monitoring of airborne particulate matter. Keywords—",

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author = "Sanju Thomas and Marina Cole and Villa-L{\'o}pez, {Farah H} and Gardner, {Julian W} and Jan Peters and Jan Theunis",

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N1 - © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. Copyright © and Moral Rights are retained by the author(s) and/ or other copyright owners. A copy can be downloaded for personal non-commercial research or study, without prior permission or charge. This item cannot be reproduced or quoted extensively from without first obtaining permission in writing from the copyright holder(s). The content must not be changed in any way or sold commercially in any format or medium without the formal permission of the copyright holders.

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N2 - In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates. The hybrid particle sensing system consists of a zinc oxide (ZnO) based solidly mounted resonator (SMR) device interfaced to a CMOS application-specific integrated circuit (ASIC) chip. Air is drawn into a virtual impactor where PM2.5 particles are separated and then deposited onto the SMR surface. The mass loading due to the fine particles is measured as a shift in the resonant frequency of the SMR working at 894 MHz. Experimental results performed in both laboratory conditions and real outdoor environment showed that the hybrid system is capable of detecting fine particles with a sensitivity of 7.5 kHz per μg/m3. This system is used as a basis towards a fully integrated portable smart particle sensor based on CMOS-SMR devices for the continuous, real-time and low- cost monitoring of airborne particulate matter. Keywords—

AB - In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates. The hybrid particle sensing system consists of a zinc oxide (ZnO) based solidly mounted resonator (SMR) device interfaced to a CMOS application-specific integrated circuit (ASIC) chip. Air is drawn into a virtual impactor where PM2.5 particles are separated and then deposited onto the SMR surface. The mass loading due to the fine particles is measured as a shift in the resonant frequency of the SMR working at 894 MHz. Experimental results performed in both laboratory conditions and real outdoor environment showed that the hybrid system is capable of detecting fine particles with a sensitivity of 7.5 kHz per μg/m3. This system is used as a basis towards a fully integrated portable smart particle sensor based on CMOS-SMR devices for the continuous, real-time and low- cost monitoring of airborne particulate matter. Keywords—

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KW - particulate matter

KW - solidly mounted resonator

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A low-cost acoustic microsensor based system in package for air quality monitoring

Abstract

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Bibliographical note

Keywords

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