A low-cost acoustic microsensor based system in package for air quality monitoring

Sanju Thomas, Marina Cole, Farah H Villa-López, Julian W Gardner, Jan Peters, Jan Theunis

    Research output: Chapter in Book/Report/Conference proceedingConference proceedingpeer-review

    6 Citations (Scopus)
    147 Downloads (Pure)

    Abstract

    In this paper we report on the development of a novel hybrid System in Package (SiP) microsensor utilizing high frequency acoustic wave devices for the real time monitoring of airborne fine particulates. The hybrid particle sensing system consists of a zinc oxide (ZnO) based solidly mounted resonator (SMR) device interfaced to a CMOS application-specific integrated circuit (ASIC) chip. Air is drawn into a virtual impactor where PM2.5 particles are separated and then deposited onto the SMR surface. The mass loading due to the fine particles is measured as a shift in the resonant frequency of the SMR working at 894 MHz. Experimental results performed in both laboratory conditions and real outdoor environment showed that the hybrid system is capable of detecting fine particles with a sensitivity of 7.5 kHz per μg/m3. This system is used as a basis towards a fully integrated portable smart particle sensor based on CMOS-SMR devices for the continuous, real-time and low- cost monitoring of airborne particulate matter. Keywords—
    Original languageEnglish
    Title of host publicationProceedings of IEEE Sensors
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Number of pages3
    ISBN (Electronic)9781479982875
    DOIs
    Publication statusPublished - 5 Jan 2017
    Event2016 IEEE SENSORS - Orlando, United States
    Duration: 30 Oct 20163 Nov 2016

    Publication series

    NameProceedings of IEEE Sensors

    Conference

    Conference2016 IEEE SENSORS
    Country/TerritoryUnited States
    CityOrlando
    Period30/10/163/11/16

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    Keywords

    • CMOS sensor
    • air quality monitoring
    • particle sensing
    • particulate matter
    • solidly mounted resonator

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